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ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT METHOD, ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT DEVICE, AND ELECTRON BEAM RECORDING DEVICE
ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT METHOD, ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT DEVICE, AND ELECTRON BEAM RECORDING DEVICE
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机译：电子束位置波动测量方法，电子束位置波动测量装置和电子束记录装置
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摘要
It is an object of the present invention to make it possible to stably and correctly measure a changing amount of a beam position when a beam displacement is measured prior to a recording operation performed by an electron beam recording apparatus. A measuring device 10 for measuring a displacement of an electron beam EP prior to a recording operation, comprises: a knife edge 11 disposed at an irradiating position of the beam spot EP; detecting means (Farady cup 12 or the like) for detecting an electron beam E irradiating through the knife edge 11; filter means (high frequency cut filter 14 or the like) for removing a changing frequency component of measurement subj ect from an output of the detecting means; and control means 15 for controlling a reference position of the electron beam E in accordance with an output from the filter means, in a manner such that the center of the beam spot EP will be at the front end position of the knife edge 11. A displacement of the beam spot EP is measured in accordance with an output change of the detecting means when the center of the beam spot EP deviates from the front end of the knife edge 11.
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