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FIN FIELD EFFECT TRANSISTOR MEMORY CELL, FIN FIELD EFFECT TRANSISTOR MEMORY CELL ARRANGEMENT, AND METHOD FOR THE PRODUCTION OF A FIN FIELD EFFECT TRANSISTOR MEMORY CELL
FIN FIELD EFFECT TRANSISTOR MEMORY CELL, FIN FIELD EFFECT TRANSISTOR MEMORY CELL ARRANGEMENT, AND METHOD FOR THE PRODUCTION OF A FIN FIELD EFFECT TRANSISTOR MEMORY CELL
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机译：鳍式场效应晶体管存储池，鳍式场效应晶体管存储池布置以及制造鳍式场效应晶体管存储池的方法
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摘要
The invention relates to a fin field effect transistor memory cell (200), a fin field effect transistor memory cell arrangement, and a method for producing a fin field effect transistor memory cell. Said fin field effect transistor memory cell comprises a first (201) and a second (202) source/drain area and a gate area. The memory cell further comprises a semiconductor fin (204) encompassing the channel zone between the first and the second source/drain area. Also provided is a charge storage layer (207, 208) that is disposed at least in part on the gate area. A wordline area (205, 206) is arranged in at least one sector of the charge storage layer. The charge storage layer is designed such that electric charge carriers can be selectively introduced into or removed from the charge storage layer by applying predefined electrical potentials to the fin field effect transistor memory cell.
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