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Thermal infrared detector having a small thermal time constant and method of producing the same

机译：具有小的热时间常数的热红外探测器及其制造方法

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摘要

In an area of a diaphragm 5 as an infrared photosensitive portion of a thermal infrared detector, a fourth dielectric protective film 8c is etched and reduced in thickness to form a fifth dielectric protective film 8d so that the thickness of the diaphragm 5 as a whole is reduced. With this structure, the thermal capacity of the diaphragm 5 is decreased and the thermal time constant is reduced. This enables the thermal infrared detector to be operated at a high frame rate. A bolometer thin film 7 is formed throughout an entire surface of the diaphragm 5.

机译：在作为热红外检测器的红外光敏部分的膜片 5 的区域中，蚀刻并还原了第四介电保护膜 8 c 通过在厚度上形成第五介电保护膜 8 d ，从而减小隔膜 5 的整体厚度。采用这种结构，膜片 5 的热容量减小并且热时间常数减小。这使得热红外检测器能够以高帧频运行。在隔膜 5的整个表面上形成辐射热计薄膜 7 。 展开▼

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公开/公告号US7180063B2

专利类型

公开/公告日2007-02-20

原文格式PDF

申请/专利权人 HIDEO WADA;NAOKI ODA;
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申请/专利号US20030697155

发明设计人 NAOKI ODA;HIDEO WADA;
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申请日2003-10-31

分类号G01J5/20;

国家 US

入库时间 2022-08-21 21:00:31

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机译：红外辐射探测器，例如船用车辆，具有检测红外辐射的辐射热传感器，包括具有各自热时间常数的中央，侧面，左侧和右侧区域以及上部和下部外围区域

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