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Method and device to reduce gate-induced drain leakage (GIDL) current in thin gate oxides MOSFETs
Method and device to reduce gate-induced drain leakage (GIDL) current in thin gate oxides MOSFETs
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机译:减少薄栅氧化物MOSFET中的栅感应漏极泄漏电流的方法和装置
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摘要
An integrated circuit which provides a FET device having reduced GIDL current is described. A semiconductor substrate is provided wherein active regions are separated by an isolation region and a gate oxide layer is provided on the active regions. A gate electrode is provided upon the gate oxide layer wherein beneath an edge of the gate electrode, a gate-drain overlap region having a high dose ion implant is provided.
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