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Wafer-based planning methods and systems for batch-based processing tools
Wafer-based planning methods and systems for batch-based processing tools
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机译:基于晶圆的计划方法和基于批处理工具的系统
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摘要
Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.
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