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Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime

机译：光学寿命长的主振荡器功率放大器（MOPA）准分子或分子氟激光系统

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摘要

The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

机译：可以通过降低入射在这些元件上的脉冲强度来延长用于深紫外（DUV）准分子激光系统（包括MOPA配置的系统）中的光学组件的寿命。在一种方法中，可以“拉伸”输出脉冲以减小脉冲的峰值功率。可以使用脉冲展宽组件，该组件可以通过水平光束路径安装在激光器外壳的外部，以提供对激光器系统占用空间影响最小的延迟线。水平光束路径还可以最小化包含高功率光束的臂中光学组件的数量。分光棱镜可以与延迟线一起使用，以避免涂层的快速降解，否则涂层会暴露在强紫外线下。棱镜可以使延迟线上的光束扩展，以使光束强度和反射损耗最小。

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公开/公告号US2007115535A1

专利类型
公开/公告日2007-05-24

原文格式PDF
申请/专利权人 SERGEI V. GOVORKOV;GONGXUE HUA;TIMUR MISURYAEV;ALEXANDER O. WIESSNER;THOMAS SCHMIDT;RAINER PAETZEL;
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申请/专利号US20070654780
发明设计人 SERGEI V. GOVORKOV;RAINER PAETZEL;THOMAS SCHMIDT;ALEXANDER O. WIESSNER;TIMUR MISURYAEV;GONGXUE HUA;
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申请日2007-01-18
分类号H01S3/00;
国家 US
入库时间 2022-08-21 21:05:05

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