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EC transferring device having a negative pressure suction inspection function, negative pressure suction inspection apparatus and method
EC transferring device having a negative pressure suction inspection function, negative pressure suction inspection apparatus and method
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机译：具有负压吸引检查功能的EC输送装置，负压吸引检查装置及方法
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摘要
PROBLEM TO BE SOLVED: To provide an electric part carrier capable of automatically detecting the vaccum of a chuck tool also detecting the sucking function. ;SOLUTION: Within a electric part carrier, a vaccum detecting device 530 is fitted to a cartridge supporting base 20 by a fitting device 480. The vaccum detecting device 530 is provided with a communication state changing device 590 changing a vacuum detecting path 550, a vacuum sensor 584, a branch path 580 from the cut-off state to the air leakage state through a throttle, a driven lever 632 for inspection, and a specific position sensor 670. In the case of detecting the vacuum, a part chuck nozzle 158 is lowered similar to the chuck, time of an electric part to rotate this lever 632 by lowering a lifting member 428 so that a chuck pipe 162 may stop up the vacuum detecting path 550 also the specific position sensor 670 may detect this lever 632 so as to read-in the vacuum. Furthermore, two kinds of values are detected according to the cut-off state and the air leakage state of the branch path 580, thereby enabling the incapable reason of applying the proper vacuum to be presumed.;COPYRIGHT: (C)1998,JPO
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