首页> 外国专利> Cleaning device and cleaning method of the functional liquid droplet ejecting heads, and a method of manufacturing a liquid crystal display device, a method of manufacturing the organic EL device, the method of manufacturing an electron-emitting device, method of manufacturing a PDP device, method of manufacturing an electrophoretic display device, a color filter method of manufacturing, a method of manufacturing an organic EL, spacer formation method, metal wiring formation method, lens forming method, light diffuser and a method of forming resist forming method

Cleaning device and cleaning method of the functional liquid droplet ejecting heads, and a method of manufacturing a liquid crystal display device, a method of manufacturing the organic EL device, the method of manufacturing an electron-emitting device, method of manufacturing a PDP device, method of manufacturing an electrophoretic display device, a color filter method of manufacturing, a method of manufacturing an organic EL, spacer formation method, metal wiring formation method, lens forming method, light diffuser and a method of forming resist forming method

机译:功能性液滴喷射头的清洁装置和清洁方法,液晶显示装置的制造方法,有机EL装置的制造方法,电子发射装置的制造方法,PDP装置的制造方法,电泳显示装置的制造方法,滤色器的制造方法,有机EL的制造方法,间隔物形成方法,金属配线形成方法,透镜形成方法,光扩散器和抗蚀剂形成方法形成方法

摘要

PROBLEM TO BE SOLVED: To prevent isolation of functional liquid and clogging of a nozzle when the functional liquid is ejected by surely cleaning a functional liquid drop ejection head.;SOLUTION: A pure water tank 202, an alcohol tank 203, and a solvent tank 204 are connected to an inlet connection attachment 5 to be connected to a functional liquid inlet of the functional liquid drop ejection head mounted on a head unit 1 with a flow-in pipe therebetween and a suction pump 225 is connected to a nozzle connection attachment 7 to be connected to an ejection nozzle of the functional liquid drop ejection head with a flow-out pipe 226 therebetween, and then the pure water, the alcohol and the solvent as a cleaning liquid is sequentially injected thereinto. The flowing speed of the cleaning liquid is raised or lowered by opening or closing a cleaning accelerating valve 219 provided at the flow-in side and a bubble is mixed in the cleaning liquid by opening or closing a bubble mixing valve 221. Each of the alcohol and the solvent is reused to be circulated.;COPYRIGHT: (C)2003,JPO
机译:解决的问题:通过可靠地清洗功能液滴喷射头来防止功能液体分离和喷嘴堵塞时的喷嘴;解决方案:纯水箱202,酒精箱203和溶剂箱204连接至入口连接附件5,以通过其间的流入管连接至安装在头单元1上的功能液滴喷射头的功能液体入口,并且抽吸泵225连接至喷嘴连接附件7。将其连接到功能性液滴喷射头的喷嘴并在其间具有流出管226,然后将纯净水,醇和溶剂作为清洁液依次注入其中。通过打开或关闭设置在流入侧的清洁加速阀219,可以提高或降低清洁液的流速,并且通过打开或关闭气泡混合阀221,可以将气泡混入清洁液中。溶剂可循环使用。版权所有:(C)2003,日本特许厅

著录项

  • 公开/公告号JP3937833B2

    专利类型

  • 公开/公告日2007-06-27

    原文格式PDF

  • 申请/专利权人 セイコーエプソン株式会社;

    申请/专利号JP20010388317

  • 发明设计人 松本 良一;

    申请日2001-12-20

  • 分类号B41J2/165;B05B15/02;B05C11/10;B05D1/26;B05D3/10;B08B1;B08B3/08;B41J2/18;B41J2/185;G02F1/1335;H05B33/10;H01L51/50;H05K3/10;

  • 国家 JP

  • 入库时间 2022-08-21 21:08:32

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