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BULK ELASTIC WAVE RESONATOR, FILTER USING THE BULK ELASTIC WAVE RESONATOR, HIGH-FREQUENCY MODULE USING THE SAME, AND OSCILLATOR USING THE BULK ELASTIC WAVE RESONATOR
BULK ELASTIC WAVE RESONATOR, FILTER USING THE BULK ELASTIC WAVE RESONATOR, HIGH-FREQUENCY MODULE USING THE SAME, AND OSCILLATOR USING THE BULK ELASTIC WAVE RESONATOR
PROBLEM TO BE SOLVED: To provide a bulk elastic wave resonator which is superior in elastic characteristics and is highly efficient for converting electromechanical energy.;SOLUTION: The bulk elastic wave resonator comprises a substrate; a lower electrode layer formed on the substrate; a middle layer formed on the lower electrode layer; a piezoelectric layer formed on the middle layer 3; and an upper electrode layer formed on the piezoelectric layer. A first misalignment, which is determined by the short side of a lattice, constituting the close-packed plane of a material constituting the middle layer and the short side of a lattice constituting the close-packed plane of a material constituting the piezoelectric layer, and a second misalignment, which is determined by the long side of the lattice constituting the close-packed plane of the material, constituting the middle layer and the long side of the lattice constituting the close-packed plane of the material constituting the piezoelectric layer, are not more than 7%. The lower electrode layer is made of a material, where the value of elastic stiffness C33 is not less than 300 GN/m2.;COPYRIGHT: (C)2007,JPO&INPIT
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机译：解决的问题：提供一种体弹性波谐振器，其弹性特性优异，并且高效地转换机电能。在基板上形成的下部电极层;在下电极层上形成的中间层;压电层形成在中间层3上;形成在压电体层上的上部电极层。由构成中间层的材料的密堆积面的格子的短边和构成压电体层的材料的密堆积面的格子的短边决定的第一未对准，以及第二未对准是由构成材料的密堆积面的格子的长边构成中间层和构成压电层的构成材料的密堆积的面的格子的长边所决定的。不超过7％。下电极层由弹性刚度C 33 的值不小于300 GN / m 2 的材料制成。版权所有：（C）2007，日本特许厅
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