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APPARATUS FOR INSPECTING EJECTION OF LIQUID DROPLET, LIQUID DROPLET EJECTOR, LIQUID DROPLET EJECTING SYSTEM, AND INSPECTION METHOD OF STATE OF DEPOSIT
APPARATUS FOR INSPECTING EJECTION OF LIQUID DROPLET, LIQUID DROPLET EJECTOR, LIQUID DROPLET EJECTING SYSTEM, AND INSPECTION METHOD OF STATE OF DEPOSIT
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机译：液滴喷射检查装置，液滴喷射器，液滴喷射系统及沉积状态检查方法
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摘要
PROBLEM TO BE SOLVED: To provide an apparatus or the like for inspecting ejection of liquid droplets which inspects an ejection state of the liquid droplets from nozzles, and which further inspects a state of deposits deposited on an electroconductive body that receives the liquid droplets.;SOLUTION: The apparatus for inspecting ejection of liquid droplets is equipped with: (A) the electroconductive body for receiving the liquid droplets ejected from the nozzles; (B) a detecting part which detects an induced current generated in the electroconductive body by the approach of charged liquid droplets; (C) a voltage applying part which applies a voltage to the electroconductive body to electrify the liquid droplets when the liquid droplets are ejected from the nozzles; and (D) a judging part which judges, on the basis of the induced current, the state of the deposits deposited on the electroconductive body due to the liquid droplets received by the electroconductive body.;COPYRIGHT: (C)2007,JPO&INPIT
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