首页>
外国专利>
SCANNING IRRADIATION METHOD OF CHARGED PARTICLE BEAM, CHARGED PARTICLE BEAM DEVICE, TEST PIECE OBSERVATION METHOD, AND TEST PIECE PROCESSING METHOD
SCANNING IRRADIATION METHOD OF CHARGED PARTICLE BEAM, CHARGED PARTICLE BEAM DEVICE, TEST PIECE OBSERVATION METHOD, AND TEST PIECE PROCESSING METHOD
展开▼
机译：带电粒子束的扫描辐照方法，带电粒子束设备，试验片观察方法和试验片加工方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To raise the accuracy of observation and the process of a profile line by preventing the charging of a test piece at the observation and process of the test piece by a charged particle beam device and effectively utilize a processing gas to be blown on the test piece at processing.;SOLUTION: A computer 13 of the charged particle beam device establishes a scanning line along the outer circumference of this scanning region, after establishing the scanning region to observe and process a mask 8, and a scanning line along this scanning line is obtained inside the scanning line, and by repeating to obtain a scanning line along the scanning line further inside the scanning line obtained, a plurality of scanning lines inside the scanning line are determined. After determining the scanning lines, the computer 13 controls the scanning circuit 12, and by carrying out thinning out of the scanning lines and thinning out of pixels, ion beams 2 are irradiated on the scanning lines.;COPYRIGHT: (C)2007,JPO&INPIT
展开▼
