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COMPOSITION EVALUATING METHOD AND PHYSICAL PROPERTY EVALUATING METHOD OF NITRIDING SILICON OXIDE FILM
COMPOSITION EVALUATING METHOD AND PHYSICAL PROPERTY EVALUATING METHOD OF NITRIDING SILICON OXIDE FILM
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机译:氮化硅膜的成分评估方法及物性评估方法
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摘要
PROBLEM TO BE SOLVED: To easily evaluate composition and composition distribution in the minute region of nitriding silicon oxide film without destroying it.;SOLUTION: In the evaluating method of composition of the nitriding silicon oxide film 2 formed on a substrate 1, the composition or the composition distribution of the nitriding silicon oxide film 2 is evaluated by measuring and analyzing a photoluminescence spectrum employing laser as a light source therefor.;COPYRIGHT: (C)2007,JPO&INPIT
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