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DIAPHRAGM AND MICROMACHINE DEVICE, AND MANUFACTURING METHOD OF MICROMACHINE DEVICE
DIAPHRAGM AND MICROMACHINE DEVICE, AND MANUFACTURING METHOD OF MICROMACHINE DEVICE
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机译：膜片和微机械装置以及微机械装置的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a diaphragm and a micromachine device that constitute a low-noise and high-sensitivity microphone, and a manufacturing method of the micromachine device.;SOLUTION: In the micromachine device with the diaphragm a movable part is supported at both sides with the first/second beams, and a first buffering part is provided between a first beam and a movable part, and a second buffering part is provided between a second beam and the movable part. Especially, the first/second buffering parts are respectively formed by protruding each tip part of the first/second beams in a folded-back shape. The manufacturing method of the micromachine device is also provided.;COPYRIGHT: (C)2007,JPO&INPIT
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