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GAS FLOW RATE THROTTLING UNIT, FLOW RATE REGULATING SYSTEM, ANALYZER AND METHOD OF ADJUSTING GAS FLOW RATE THROTTLING UNIT
GAS FLOW RATE THROTTLING UNIT, FLOW RATE REGULATING SYSTEM, ANALYZER AND METHOD OF ADJUSTING GAS FLOW RATE THROTTLING UNIT
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机译：气体流量节流装置，流量调节系统，分析仪和调节气体流量节流装置的方法
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摘要
PROBLEM TO BE SOLVED: To provide a gas flow rate throttling unit capable of simply regulating a precise flow rate even with respect to a low-molecular gas such as a hydrogen gas or the like and requiring no special installation place, and to provide a flow rate regulating system using this gas flow rate throttling unit, an analyzer and a simple adjusting method of the gas flow rate throttling unit.;SOLUTION: The gas flow rate throttling unit includes a main body 10 having a piercing hole 11 and a regulation screw 20 having a male screw 21, and the piercing hole 11 has a female screw part 11a having the regulation screw threaded with its one end side and the caliber of the relay part 11c adjacent to the female screw part 11a is smaller than the outer diameter of the male screw 21 of the regulation screw 20.;COPYRIGHT: (C)2007,JPO&INPIT
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