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Micromachined bi-axial accelerometer, has mobile and fixed electrodes with mobile and fixed fingers placed so as to form interdigital comb microstructure overlapped with microstructure formed by another set of mobile and fixed electrodes
Micromachined bi-axial accelerometer, has mobile and fixed electrodes with mobile and fixed fingers placed so as to form interdigital comb microstructure overlapped with microstructure formed by another set of mobile and fixed electrodes
The accelerometer has a mobile electrode (2) and fixed electrodes (4A, 4B) with respect to a substrate (5) and equipped with a set of mobile fingers (7) and fixed fingers (8A, 8B), respectively. Each mobile finger is disposed between two adjacent fixed fingers to form an interdigital comb microstructure (20). A mobile electrode (40) is associated to a fixed electrode (42) to form another interdigital comb microstructure (22) overlapped with the microstructure (20). An independent claim is also included for a process for manufacturing an accelerometer.
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