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Apparatus for the measurement of light, with a set of reference wavelengths, develops correction coefficients to process the wavelength measurement to give an undistorted value

机译:用于测量具有一组参考波长的光的设备会产生校正系数,以处理波长测量值以获得不失真的值

摘要

The apparatus (40), to measure the wavelength of light, has a measurement section (42) for a reference wavelength. It has interference strips giving reference wavelengths (delta 1,delta 2) through differences in the optical light paths. A measurement section (44) for the incoming light uses the reference light values with sets of interference strips. A section (46) determines the correction coefficient to give a second correction coefficient (k), based on the measured light wavelength with a second reference wavelength and the incoming light wavelength (delta m) for adjustment at a correction section (48).
机译:用于测量光的波长的设备(40)具有用于参考波长的测量部分(42)。它具有干涉带,可通过光路中的差异给出参考波长(δ1,δ2)。入射光的测量部分(44)将参考光值与干涉带组一起使用。部(46)基于在第二校正部(48)进行调整的测得的具有第二基准波长的光波长和入射光波长(δm),决定校正系数,并给出第二校正系数(k)。

著录项

  • 公开/公告号DE102006014568A1

    专利类型

  • 公开/公告日2006-10-05

    原文格式PDF

  • 申请/专利权人 ADVANTEST CORP.;

    申请/专利号DE20061014568

  • 发明设计人 MASUDA SHIN;NIKI SHOJI;

    申请日2006-03-29

  • 分类号G01J9/02;

  • 国家 DE

  • 入库时间 2022-08-21 21:20:06

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