首页> 外国专利> Polarizer device for illumination system, has interference device converting light beam with angular distribution to another beam, and decoupling device receiving latter beam and emitting beam with another angular distribution

Polarizer device for illumination system, has interference device converting light beam with angular distribution to another beam, and decoupling device receiving latter beam and emitting beam with another angular distribution

机译：用于照明系统的偏振器装置，具有将具有角度分布的光束转换为另一光束的干涉装置，以及接收后一光束并发射具有另一角度分布的光束的解耦装置

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摘要

The device has an angle variable launching device (150) for receiving an incoming light beam and producing a light beam with a provided angular distribution. An angle selective polarization interference device (160) converts the light beam into another light beam based on a defined angular function. An angle variable decoupling device receives the latter light beam and emits the latter beam with another angular distribution. An independent claim is also included for an illumination system of a microlithography-projection illumination arrangement.

机译：该装置具有角度可变发射装置（150），用于接收入射光束并产生具有提供的角度分布的光束。角度选择偏振干涉装置（160）基于定义的角度函数将光束转换为另一光束。角度可变解耦装置接收后一光束并以另一角度分布发射后一光束。还包括针对微光刻投影照明布置的照明系统的独立权利要求。

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公开/公告号DE102005030543A1

专利类型
公开/公告日2006-02-02

原文格式PDF
申请/专利权人 CARL ZEISS SMT AG;
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申请/专利号DE20051030543
发明设计人 TOTZECK MICHAEL;FELDMANN HEIKO;GRUNER TORALF;SCHUSTER KARL-HEINZ;GREIF-WUESTENBECKER JOERN N.;STROESSER ULRICH;SCHERUEBL THOMAS;HARNISCH WOLFGANG;
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申请日2005-06-22
分类号G02B27/28;G02B5/30;G02B5/28;G03F7/20;
国家 DE
入库时间 2022-08-21 21:20:14

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