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Microphone for e.g. signal processing module, has diaphragms, whose acoustic resonances lie in acoustic operating frequency range of microphone, where resonances of diaphragms are shifted against each other and overlap range of microphone
Microphone for e.g. signal processing module, has diaphragms, whose acoustic resonances lie in acoustic operating frequency range of microphone, where resonances of diaphragms are shifted against each other and overlap range of microphone
The microphone has a set of diaphragms that are electrically interconnected with one another and includes different masses such that an acoustic resonance of each diaphragm lies in an acoustic operating frequency range (FB) of the microphone. Resonances of the individual diaphragms are shifted against each other in a frequency and overlap the operating frequency range of the microphone. An independent claim is also included for a method for producing a microphone chip.
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