Arrangement for calibrating a network analyzer for on-wafer measurement on integrated microwave circuits

• 1. 一种用于夹持晶圆以对其进行腐蚀的夹具 [P] . 中国专利： CN210628271U . 2020.05.26
• 2. 用于夹持晶圆以对其进行腐蚀的夹具 [P] . 中国专利： CN103187346B . 2016.02.10
• 3. Arrangement for calibrating a network analyzer for on-wafer measurement at integrated microwave circuits [P] . 美国专利： US6008656A . 1999-12-28

  机译： 校准网络分析仪以在集成微波电路上进行晶圆上测量的装置

• 4. Arrangement for calibrating a network analyzer for on-wafer measurement on integrated microwave circuits [P] . 德国专利： DE19639515A1 . 1998-04-02

  机译： 校准用于集成微波电路上晶圆上测量的网络分析仪的装置

• 5. Device for calibrating a network analyser for on-wafer measurement of an integrated microwave circuit [P] . 欧洲知识产权局专利： EP0833167B1 . 2005-07-27

  机译： 用于校准用于集成微波电路的晶片上测量的网络分析仪的设备

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