首页>
外国专利>
METHOD FOR PRODUCING BEAMS OF FAST ELECTRONS, IONS, ATOMS, AS WELL AS ULTRAVIOLET AND ROENTGEN RAYS, OZONE, AND/OR OTHER CHEMICALLY ACTIVE MOLECULES IN DENSE GASES
METHOD FOR PRODUCING BEAMS OF FAST ELECTRONS, IONS, ATOMS, AS WELL AS ULTRAVIOLET AND ROENTGEN RAYS, OZONE, AND/OR OTHER CHEMICALLY ACTIVE MOLECULES IN DENSE GASES
FIELD: semiconductor engineering.;SUBSTANCE: new gaseous-discharge conditions are proposed, as follow: En/N = U/Δ·N, where En is characteristic value of electric field intensity in near-electrode area of gas with slow electrons; N is concentration of gas mixture neutral particles in electric field area under discussion; U is potential of high-voltage electrode relative to ground or to other nearest electrode; Δ is size along direction of intermediate electric field of high-voltage potential space-time localizing area. Runaway electrons whose energy amounts to hundreds of keV and currents, to hundreds of kA in corona and space discharges, as well as discharges over dielectric surface and their combination are more efficiently generated under such conditions. Fast electrons can be generated in single-electrode corona discharge and fast electron beams are efficiently generated in dense-gas space discharges combined with surface discharge or discharges in dielectric tubes; power density of X-ray, ultraviolet, and violet radiation from discharge is effectively controlled, ozone and/or other chemically active or excited molecules in dense gases can be obtained in discharge with runaway electrons.;EFFECT: enlarged functional capabilities, enhanced amplitude of beam current both in electrode-to-electrode gap and in past-anode space.;16 cl, 15 dwg
展开▼
机译：领域：半导体工程。物质：提出了新的气体放电条件，如下：E n / N = U /ΔN，其中E n 是电子慢的气体近电极区域的电场强度特征值; N是讨论中的电场区域中混合气体中性粒子的浓度; U是高压电极相对于地面或其他最近电极的电势; ＆三角洲;是沿高压电位时空局部区域的中间电场方向的大小。在这种条件下，可以更高效地产生失控电子，其能量达数百keV和电流，达电晕和空间放电中的数百kA，以及介电表面上的放电及其组合。在单电极电晕放电中可以产生快速电子，在稠密气体空间放电中结合表面放电或介电管中的放电，可以有效地产生快速电子束。有效控制放电产生的X射线，紫外线和紫光的功率密度，利用失控的电子在放电中可以获得致密气体中的臭氧和/或其他化学活性或激发的分子;效果：功能增强，振幅增加电极间和阳极间隙中的电子束电流; 16 cl，15 dwg
展开▼
