首页> 外国专利> Mount for mounting a sample for inspection by a transmission electron microscope and method of manufacturing a sample using the same

Mount for mounting a sample for inspection by a transmission electron microscope and method of manufacturing a sample using the same

机译:用于安装样品以进行透射电子显微镜检查的安装座以及使用该安装座的样品的制造方法

摘要

In the process of making specimens for transmission electron microscopy , grinding to have the target thickness of the specimen is pre-set while the piece is secured to the mount. And the first groove in which the specimen is inserted, the upper surface of the mount , and the second groove is formed to separate the specimen from the first groove . The specimen is fixed to the first mounting groove using a wax , the portion protruding from the mount is grinding by a grinder . The depth of the first groove is determined by the target thickness of the specimen , the protruding portion of the specimen to the upper surface of the grinding is mounted. Thus , the sample having a target thickness can be readily produced .
机译:在制备用于透射电子显微镜的样品的过程中,将工件固定在底座上时,要预先进行打磨以达到样品的目标厚度。并且形成有用于插入样本的第一凹槽,安装架的上表面以及第二凹槽,以将样本与第一凹槽分开。用蜡将样品固定在第一安装槽上,从固定架突出的部分用研磨机研磨。第一凹槽的深度由试样的目标厚度决定,试样的突出部分安装到磨削的上表面。因此,可以容易地生产具有目标厚度的样品。

著录项

  • 公开/公告号KR100558196B1

    专利类型

  • 公开/公告日2006-03-10

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20030075553

  • 发明设计人 이선영;이명락;

    申请日2003-10-28

  • 分类号H01L21/304;

  • 国家 KR

  • 入库时间 2022-08-21 21:24:12

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