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STRUCTURE AND FABRICATION PROCESSES OF FIELD-EFFECT FULLERENE SHUTTLE NANOMEMORY DEVICE BASED ON CARBON NANOPEAPOD
STRUCTURE AND FABRICATION PROCESSES OF FIELD-EFFECT FULLERENE SHUTTLE NANOMEMORY DEVICE BASED ON CARBON NANOPEAPOD
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机译：基于碳纳米颗粒的场效应富勒烯穿壳纳米机的结构与制备过程
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摘要
The present invention relates to a nanometer-zone-information storage device manufacturing process, and more particularly, the fullerene (Fullerene) and endo contained therein using the bean-shaped carbon nanotube (Carbon Nanopeapod) - positions of the fullerene (Endo-Fullerene) by the control by an external electric field and the fullerene endo- according to the position of the fullerene relates to a process method to be used as electronic data storage device.; By operating the position of the fullerene from the internal carbon nanocapsules it has been presented that the same may be used as information storage, but by creating a carbon nanocapsules used as nano-information storage is technically very difficult. In addition, even if a substantially produce the nanocapsules have a difficult hagieneun manufactured with the integrated device.; In the present invention, to solve the above problems by using a bean-shaped nanotubes, fullerene and endo- show that the fullerene to produce character information repository via a position control, it is an object of invention a process and a structure therefor. Bean-shaped nanotubes, and to be synthesized in large quantities, using a technique capable of uniformly arranged so as to made with the integrated device.; In order to achieve this object, the present invention sheath structure nanotube step of regularly arranged, pod nano one step of depositing a metal electrode on the tube, the fullerene of the inside through the oxide film and nanotubes etched on the other side on the insulating substrate and endo-step of discharging the fullerene from carbon nanotube, fullerene and endo therein through which - a space in the fullerene can reciprocate, and to re-deposit a metal electrode made of a step of forming an electrode on either side of the nanotubes process that is characteristic.
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