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Point diffraction interferometer with enhanced contrast

机译：具有增强对比度的点衍射干涉仪

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摘要

The interferometer has a diffraction grating 21, a condenser lens 22, a transparent substrate 23, a field lens 24 and an imaging device 25 arranged in this order. The transparent substrate 23 is arranged at the position in the optical axis direction where both focal spots of a zeroth-order diffracted light L21 and a first-order diffracted light L22 are formed. Formed on the transparent substrate 23 is a circular opaque zone 23a whose central position is the central position of the focal spot of the first-order diffracted light L22. Formed at the center of the opaque zone 23a is a pinhole 23b whose central position is the central position of the focal spot of the first-order diffracted light L22. The contrast of the interference fringes observed on the image device 25 is enhanced by the optical interference between the first-order diffracted light L22 passing through the pinhole 23b and the zeroth-order diffracted light L21 passing through the transparent substrate 23.

机译：干涉仪具有衍射光栅 21 ，聚光透镜 22 ，透明基板 23 ，物镜 24 依次排列的摄像装置 25 。透明基板 23 被布置在光轴方向上的零阶衍射光L 21 和一阶衍射光L < B> 22 形成。圆形不透明区域 23 a 形成在透明基板 23 上，其中心位置是一阶焦点的中心位置衍射光L 22 。针孔 23 b 形成在不透明区域 23 a 的中心，其中心位置是中心位置一阶衍射光L 22 的焦点的变化通过针孔 23 <的第一级衍射光L 22 之间的光学干涉增强了在图像设备 25 上观察到的干涉条纹的对比度。 / B> b 和穿过透明基板 23的零级衍射光L 21 。 展开▼

著录项

公开/公告号US7095510B2

专利类型

公开/公告日2006-08-22

原文格式PDF

申请/专利权人 KENJI FUKUI;
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申请/专利号US20030726821

发明设计人 KENJI FUKUI;
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申请日2003-12-02

分类号G01B9/02;

国家 US

入库时间 2022-08-21 21:42:52

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