Phase measurement apparatus for measuring characterization of optical thin films

• 1. 电特性测量设备、电特性测量系统、电特性测量方法以及用于使计算机实现所述方法的电特性测量程序 [P] . 中国专利： CN107209134B . 2020.05.26
• 2. 电特性测量设备、电特性测量系统、电特性测量方法以及用于使计算机实现所述方法的电特性测量程序 [P] . 中国专利： CN107209134A . 2017-09-26
• 3. Phase measuring method and apparatus for measuring characterization of optical thin films [P] . 美国专利： US7327467B2 . 2008-02-05

  机译： 用于测量光学薄膜特性的相位测量方法和装置

• 4. Phase measuring method and apparatus for measuring characterization of optical thin films [P] . 美国专利： US2006055940A1 . 2006-03-16

  机译： 用于测量光学薄膜特性的相位测量方法和装置

• 5. Optical film thickness measurement apparatus and the optical film thickness measuring apparatus thin film forming apparatus using the [P] . 日本专利： JPWO2013121546A1 . 2015-05-11

  机译： 光学膜厚测定装置及使用该光学膜厚测定装置的光学膜厚测定装置的薄膜形成装置

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• 1. MICROSTRUCTURES　AND　OPTICAL　PROPERTIES　OF　Te_（81）Ge_（15）Sb_4　THIN　FILMS　USED　FOR　PHASE　CHANGE　RECORDING　MATERIALS [J] . Song Lianpeng ,Huang Shuwan . 中国有色金属学会会刊：英文版 . 1995,第3期
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