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SEPARATION AND CONFINEMENT OF MENISCUS BY BARRIER WITH NON-AFFINITY
SEPARATION AND CONFINEMENT OF MENISCUS BY BARRIER WITH NON-AFFINITY
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机译：非亲和力对垒的分离和限制
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摘要
PROBLEM TO BE SOLVED: To provide an apparatus and a technique for efficiently supplying and removing a fluid to and from a wafer surface, while reducing contamination and the cost of processing wafers.;SOLUTION: In one of many embodiments, there is provided a method for processing a substrate. The method has a step of forming a first fluid meniscus and a second fluid meniscus on the surface of the substrate. At this time, the first fluid meniscus is approximately adjacent to the second fluid meniscus. Moreover, this meniscus has a step of separating the first fluid meniscus from the second fluid meniscus by a barrier.;COPYRIGHT: (C)2006,JPO&NCIPI
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