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ELASTIC SURFACE ACOUSTIC WAVE ELEMENT AND MANUFACTURING METHOD OF ELASTIC SURFACE ACOUSTIC WAVE ELEMENT
ELASTIC SURFACE ACOUSTIC WAVE ELEMENT AND MANUFACTURING METHOD OF ELASTIC SURFACE ACOUSTIC WAVE ELEMENT
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机译:弹性表面声波元件及制造方法
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摘要
PROBLEM TO BE SOLVED: To provide an SAW element exhibiting good mechanical strength such as a sticking tendency or bending strength after it is mounted on a printed board even in the case of a small and thin SAW element.;SOLUTION: In an SAW element formed by bonding an elastic surface acoustic element piece having at least an interdigital electrode, a lead out electrode connected with the interdigital electrode, and a bonding film of a metal pattern surrounding these electrodes formed on one major surface of a piezoelectric substrate to a cover substrate formed with a through hole at a position on the major surface thereof corresponding to the lead out electrode, and having one major surface arranged with a metal pattern at a position around the through hole overlapping the lead out electrode and a position corresponding to the bonding film and the other major surface arranged with an external electrode where the through hole is coated with a metal film for conduction, a recess is formed on the other major surface of the cover substrate such that at least a part thereof overlaps a position for arranging the external electrode.;COPYRIGHT: (C)2007,JPO&INPIT
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