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Brief description of embodiments of the structure of a domain has gaps lateral and structure of the corresponding domain
Brief description of embodiments of the structure of a domain has gaps lateral and structure of the corresponding domain
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机译：域的结构的实施例的简要描述具有横向的间隙和对应域的结构
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摘要
Production of microsystem structure with lateral gaps comprises: (a) depositing first sacrificial layer on substrate; (b) forming structural element on sacrificial layer, to form mobile add-on structure with 2 degrees of freedom; (c) covering free surface of structural element with second sacrificial layer of thickness (e=dg) equal to linear dimension of gap; and (d) covering first sacrificial layer with layer of material to form another add-on structure. The production of a microsystem structure with lateral gaps consists of: (a) depositing a first sacrificial layer (CS1) on a substrate (S); (b) forming a structural element (SE) on this sacrificial layer, to form a mobile add-on structure with two degrees of freedom (YY, XX); (c) covering the free surface of the structural element with a second sacrificial layer (CS2) of a thickness (e=dg) equal to the linear dimension of the gap; (d) covering the first sacrificial layer with a layer of material (SM) to form another add-on structure; (e) etching the second sacrificial layer and subsequently the first sacrificial layer to prevent, at least partially, any contact between the structural element in the direction of the first and second degrees of freedom and any other add-on structure and the substrate to produce lateral gaps having a width essentially equal to the thickness of the second sacrificial layer. Independent claims are also included for: (a) a microsystem structure incorporating add-on structures, one of which is mobile with two degrees of freedom, on a substrate by this method; (b) a vibrating beam microresonator incorporating such a microsystem structure; (c) a Lame mode microresonator incorporating such a microsystem structure.
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