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aufschlu00e4mmung of ceriumoxid for polishing, method for the production of these aufschlu00e4mmung and method for polishing the aufschlu00e4mmung
aufschlu00e4mmung of ceriumoxid for polishing, method for the production of these aufschlu00e4mmung and method for polishing the aufschlu00e4mmung
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机译:用于抛光的氧化铈的aufschl制备这些aufschl的方法和抛光aufschl的方法
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摘要
A cerium oxide slurry for polishing comprising cerium oxide dispersed in water, wherein the slurry has a conductivity of about 30 c muS/cm or less when the cerium oxide concentration in the slurry is c wt. %. In order to adjust the conductivity to about 30 c muS/cm or less, cerium oxide is washed with deionized water.
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