首页>
外国专利>
An integrated microvalve and method for producing a microvalve
An integrated microvalve and method for producing a microvalve
展开▼
机译：集成微型阀和制造微型阀的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention relates to an integrated microvalve with a substrate, a first functional layer applied on the substrate and with a second functional layer, which on the first functional layer is applied, at least in a valve region the first functional layer is formed as a membrane, whereby in the valve region and in a leading the second functional layer is removed from the substrate in the valve region and an anvil is exposed, which essentially only is connected to the membrane, wherein the second functional region, a plate is applied, in order to form a valve chamber.
展开▼
