首页> 外国专利> Production of a layer made from ferroelectric material used in the production of a ferroelectric capacitor comprises roughening a ferroelectric material layer on a surface and applying an electrode to the roughened surface

Production of a layer made from ferroelectric material used in the production of a ferroelectric capacitor comprises roughening a ferroelectric material layer on a surface and applying an electrode to the roughened surface

机译：由用于铁电电容器的生产中的由铁电材料制成的层的生产包括在表面上使铁电材料层粗糙化并将电极施加到粗糙化的表面上

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摘要

Production of a layer made from ferroelectric material with electrodes (1) comprises roughening a layer (7) of ferroelectric material on a surface and applying an electrode to the roughened surface or roughening a surface of an electrode and depositing a layer of ferroelectric material on the roughened surface. An independent claim is also included for a layer of ferroelectric material with an applied electrode.

机译：由具有电极的铁电材料制成的层（1）的生产包括：在表面上使铁电材料层（7）粗糙化;将电极施加到粗糙化的表面上;或使电极的表面粗糙化;以及在电极上沉积一层铁电材料层。粗糙的表面。对于具有施加的电极的铁电材料层也包括独立权利要求。

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公开/公告号DE10330535A1

专利类型
公开/公告日2005-02-03

原文格式PDF
申请/专利权人 FORSCHUNGSZENTRUM JUELICH GMBH;
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申请/专利号DE2003130535
发明设计人 KOHLSTEDT HERMANN;
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申请日2003-07-07
分类号H01L21/8239;H01L21/314;
国家 DE
入库时间 2022-08-21 22:01:20

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