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A method for determining the surface structure of a sample of material with ultrashort laser pulses and apparatus for carrying out the method
A method for determining the surface structure of a sample of material with ultrashort laser pulses and apparatus for carrying out the method
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机译：用超短激光脉冲确定材料样品表面结构的方法和实施该方法的设备
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摘要
A method for determining the surface structure of a material sample, in the case of the laser pulses with a pulse duration of 1 to 100 femtoseconds are generated, and through a microscope device comprising a lens of a numerical aperture of 0,5 to 1,0 are routed, and a respective laser pulse (14) to a with respect to the position of the material sample with x, y and z - coordinates defined spatial point is focused adjustable in a targeted manner, whereby subsequently, as a function of the variation of the z - the direction of the plasma luminescence, the from the interaction of the laser pulse with the sample results, from the focal area of the laser pulse (14) with the lens (20) of the microscope device is collected.a) the intensity of the laser pulse (14) in the focus is set to a value of the above the threshold for generating a plasma during the material of the material sample (22) is,b) wherein the collected from the interaction resulting plasma radiation is detected,c) wherein the detected signal with respect to its intensity in relation to the z - the direction of the evaluated..
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