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Measurement procedures in the batch manufacturing process of individual products and methods and systems for assessing the uncertainties arising from the measurements

机译:单个产品的批量生产过程中的测量程序以及评估测量结果不确定性的方法和系统

摘要

In the testing of certain discrete devices, such as integrated circuits, it has been found that variations in measurements are often caused by error terms from the measurement equipment and process. The invention provides a statistical process control (SPC) method and apparatus that determines the errors introduced by the measurement equipment and process. Statistical processes are provided to compensate for these errors and improve the accuracy of the testing process. The measurement errors are based upon repeated independent measurements of select parameters of each unit tested.
机译:在测试某些分立器件(例如集成电路)时,已经发现测量变化通常是由测量设备和过程中的误差项引起的。本发明提供一种统计过程控制(SPC)方法和设备,其确定由测量设备和过程引入的误差。提供统计过程以补偿这些错误并提高测试过程的准确性。测量误差基于对每个测试单元的选择参数的重复独立测量。

著录项

  • 公开/公告号KR100495194B1

    专利类型

  • 公开/公告日2005-09-30

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR19980704647

  • 申请日1998-06-19

  • 分类号G05B19/418;

  • 国家 KR

  • 入库时间 2022-08-21 22:03:44

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