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Micro-magnetoelastic biosensor arry for detection of DNA hybridization and fabricating method thereof
Micro-magnetoelastic biosensor arry for detection of DNA hybridization and fabricating method thereof
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机译：用于DNA杂交检测的微磁弹性生物传感器及其制备方法
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摘要
The invention magnetostrictive oscillating (磁 歪, Magnetostriction) of FIG dielectric material By activating the array of sensors, without using a marker such as the isotopes hydrogen or an enzyme and a fluorescent dye, analysis and, diaen A (DNA) by the alternating magnetic field It provides a magnetostrictive biosensor and a method for manufacturing fast and simple dynamic information, such as a crossing step for the mating capable diaen this detection to observe in real time.; The present invention to accomplish this step of the magnetic layer for the step in which a silicon nitride film is deposited on the bottom of the silicon thin film, a tungsten film deposited by the sputtering method on the upper surface, the tungsten magnetostriction on the thin film sensor material deposition, wherein steps Chemistry magnetic layer is patterned using optical lithography method, using the sputtering method on the upper surface of the magnetic layer diaen a (DNA) depositing a gold layer for fixing, by using the sputtering technique the tungsten capping layer (capping Layer of ) characterized by comprising a step of deposition, the deposition steps to screen a tungsten thin film pattern, comprising the steps of etching treatment of the silicon substrate with an aqueous solution and the step of removing the capping layer of the tungsten.
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