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CONTAMINATION CONTROL SYSTEM AND AIR-CONDITIONING SYSTEM OF SUBSTRATE PROCESSING APPARATUS USING THE SAME FOR PREVENTING ERRORS DUE TO VARIOUS CONTAMINATION SOURCES BY IMPROVING WET TYPE AIR-CONDITIONING SYSTEM
CONTAMINATION CONTROL SYSTEM AND AIR-CONDITIONING SYSTEM OF SUBSTRATE PROCESSING APPARATUS USING THE SAME FOR PREVENTING ERRORS DUE TO VARIOUS CONTAMINATION SOURCES BY IMPROVING WET TYPE AIR-CONDITIONING SYSTEM
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机译：改进湿式空调系统，防止因各种污染源引起的误差的基板处理装置的污染控制系统和空调系统
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摘要
PURPOSE: A contamination control system and an air-conditioning system of a substrate processing apparatus using the same are provided to prevent errors due to various contamination sources by improving a wet type air-conditioning system. CONSTITUTION: An injection unit(100) includes one or more nozzle to inject water. One or more remover(110) is used for trapping the water containing contaminants. A circulation unit supplies the circulation water including an additive for controlling pH to the injection unit. The additive has a function for absorbing light and generating active kinds including electrons and holes. The active kinds are used for analyzing contaminants of the circulation water.
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