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Testing multiple levels in integrated circuit technology development

机译:在集成电路技术开发中测试多个级别

摘要

A method of testing an integrated circuit is provided, which includes providing a semiconductor substrate having a semiconductor device provided thereon. A first dielectric layer is formed over the semiconductor substrate and a first channel is formed in the first dielectric layer in contact with the semiconductor device. A first contact pad mask layer is formed and a first contact pad in the first contact pad mask layer is formed in contact with the first channel. The first contact pad is used to test the first channel and the semiconductor device and the first contact pad mask layer and the first contact pad are removed.
机译:提供一种测试集成电路的方法,该方法包括提供其上具有半导体器件的半导体衬底。在半导体衬底上方形成第一介电层,并且在第一介电层中形成与半导体器件接触的第一沟道。形成第一接触垫掩模层,并且形成第一接触垫掩模层中的第一接触垫以与第一沟道接触。第一接触垫用于测试第一沟道,并且去除半导体器件以及第一接触垫掩模层和第一接触垫。

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