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Piezoelectric device and acousto-electric transducer and method for manufacturing the same
Piezoelectric device and acousto-electric transducer and method for manufacturing the same
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机译：压电装置和声电换能器及其制造方法
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摘要
A lens shape piezoelectric device which is thinner than the manufacture limit thickness, which is conventionally difficult to manufacture, and a method for manufacturing the same. The piezoelectric device has a oscillation part having at least two steps where one side thereof is planar and the opposite side is thickest at a peripheral holding portion and thinner toward the central portion. A piezoelectric element of another embodiment has an oscillation part of at least two steps where the peripheral holding portion is thickest on both sides and the thickness decreases toward the central portion. In these piezoelectric devices, at least one side of the thinnest central portion of the oscillation part has a convex lens shape. A pair of electrodes are vacuum deposited in the center of these oscillation parts on both sides, and a gold wire is led as a lead wire from each electrode.
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