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Method of manufacturing magnetic multilayer film, method of manufacturing magnetic recording medium, magnetic multilayer film and magnetic recording medium
Method of manufacturing magnetic multilayer film, method of manufacturing magnetic recording medium, magnetic multilayer film and magnetic recording medium
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机译：磁性多层膜的制造方法，磁性记录介质的制造方法，磁性多层膜和磁性记录介质
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摘要
On a substrate at a temperature of 120 to 240 C., Fe and Pt monatomic layers are alternately laminated. The magnetic multilayer film obtained by such a method has an L10 ordered structure so as to exhibit a high magnetic anisotropy energy constant, a (001) surface parallel to the substrate surface, and a high perpendicular magnetic anisotropy, while its coercive force in a direction perpendicular to the substrate surface and the squareness ratio of its magnetization curve in a direction perpendicular to the substrate surface are large, so that it is usable as a magnetic recording film for a magnetic recording medium and the like. Also, since the magnetic multilayer film is formed while the substrate temperature is 120 to 240 C., the temperature load on the substrate or the like is lowered as compared with conventional making methods in which the substrate temperature is about 500 C.
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