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Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device

机译：控制动子装置的方法，动子装置的协作装置，动子装置的协作方法，半导体制造装置，液晶制造装置和机械扫描离子注入装置

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摘要

A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.

机译：一种动子装置的控制方法，其特征在于，包括：固定基座;以及固定在所述固定基座上的部件。可移动基座，其可相对于固定基座在线性方向上移动;处理基座，其相对于可动基座可沿线性方向移动，该线性方向与可动基座的线性移动方向平行。设置在处理基座和可动基座之间并与处理基座和可动基座协作而形成主移动单元的移动力产生单元包括以下步骤：从移动力产生单元产生移动力。使处理基座相对于可移动基座移动，从而由于处理基座相对于可移动基座的移动而使处理基座相对于固定基座移动;借助于由移动力产生单元产生的移动力引起的反作用力，使可移动基座在固定基座上沿与处理基座的移动方向相反的方向移动，以使处理基座移动。在与固定基座上的处理基座的移动方向相反的方向上;并且控制处理基座相对于固定基座的移动速度。

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公开/公告号US2005188924A1

专利类型
公开/公告日2005-09-01

原文格式PDF
申请/专利权人 KEIJI OKADA;MICHIRO SUGITANI;YOSHITOMO HIDAKA;JUNICHI MURAKAMI;FUMIAKI SATO;MITSUKUNI TSUKIHARA;SUGURU HIROKAWA;MASAMITSU SHINOZUKA;
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申请/专利号US20050044632
发明设计人 KEIJI OKADA;MICHIRO SUGITANI;YOSHITOMO HIDAKA;JUNICHI MURAKAMI;FUMIAKI SATO;MITSUKUNI TSUKIHARA;SUGURU HIROKAWA;MASAMITSU SHINOZUKA;
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申请日2005-01-28
分类号C23C16/00;
国家 US
入库时间 2022-08-21 22:24:29

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