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Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system
Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system
A method for detecting a small amount of biopolymer by using resonant frequency shift of PZT monolithic cantilever system using a cantilever includes: an infinitesimal fluid transfer system having an inlet for allowing a reactant to be injected therethrough and an infinitesimal introduction channel for connecting the inlet and a reaction chamber; and a cantilever sensor installed in the reaction chamber and having a cantilever with one end fixed at a substrate, a piezoelectric capacitor for self-sensing and actuating on at least one side of an upper surface and a lower surface of the cantilever including a piezoelectric film, a lower electrode formed at a lower surface of the piezoelectric film and an upper electrode formed at an upper surface of the piezoelectric film, an electric pad for applying electricity to the lower electrode and the upper electrode, and a molecular recognition layer formed at least one surface of the cantilever and so as to interact to an target biopolymer.
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