首页>
外国专利>
Dust detection equipment for clean room, dust detection system, fine instrument and dust detection method
Dust detection equipment for clean room, dust detection system, fine instrument and dust detection method
展开▼
机译：洁净室用除尘设备，除尘系统，精细仪器及除尘方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a dust detection system capable of accurately detecting dust. ;SOLUTION: The image of a dust collection sheet 11 which accumulated with the dust on a surface 11s is transmitted through the diffusion sheet 12 in dust detector 10, and photographed by a CCD camera 15 via a lens 13 and a lens 14. The image data of the image, photographed by the dust detector 10, are transmitted to an analysis computer 30 via a cable 18. The image data is processed by a double circumferential difference calculus in the computer 30, to detect the number and a shape of the dust.;COPYRIGHT: (C)2003,JPO
展开▼
