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METHOD FOR DETECTING FOREIGN MATTER BETWEEN SUBSTRATES, NEAR FIELD EXPOSING METHOD, DETECTOR OF FOREIGN MATTER BETWEEN SUBSTRATES AND NEAR FIELD EXPOSURE DEVICE
METHOD FOR DETECTING FOREIGN MATTER BETWEEN SUBSTRATES, NEAR FIELD EXPOSING METHOD, DETECTOR OF FOREIGN MATTER BETWEEN SUBSTRATES AND NEAR FIELD EXPOSURE DEVICE
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机译：基板间异物的检测方法，近场曝光方法，基板间异物的检测器及近场曝光装置
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摘要
PROBLEM TO BE SOLVED: To provide a method for detecting foreign matter between substrates constituted so as to enhance a yield by detecting the foreign matter present between the substrates, and to provide a near field exposing method, a detector of the foreign matter between the substrates and a near field exposure device.;SOLUTION: For example, this detection means of the foreign matter between the substrates is adapted to the near field exposing method, which is constituted so as to deform an exposure mask to bring the same into close contact with an object 106 to be treated to perform exposure using the near field bleeding out of the fine opening formed to the exposure mask, or the near field exposure device therefor. This detection means has a means 103 for bringing the exposure mask into close contact with the object to be treated and a means 110 for detecting the deformation of the exposure mask produced by the foreign matter 111 present between the exposure mask and the object to be treated to be bonded to them.;COPYRIGHT: (C)2005,JPO&NCIPI
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