首页> 外国专利> OUTPUT MONITORING DEVICE OF INVERSE DISPERSION DOUBLE SPECTROSCOPE, INVERSE DISPERSION DOUBLE SPECTRAL DEVICE EQUIPPED WITH THE SAME, AND CONTROL METHOD OF INVERSE DISPERSION TYPE DOUBLE SPECTROSCOPE

OUTPUT MONITORING DEVICE OF INVERSE DISPERSION DOUBLE SPECTROSCOPE, INVERSE DISPERSION DOUBLE SPECTRAL DEVICE EQUIPPED WITH THE SAME, AND CONTROL METHOD OF INVERSE DISPERSION TYPE DOUBLE SPECTROSCOPE

机译:逆色散双谱的输出监视装置,具有该装置的逆色散双谱器,以及逆色散双谱的控制方法

摘要

PROBLEM TO BE SOLVED: To monitor the incident situations of the rays of light to the output optical fibers without impairing the rays of light which are made incident on the output optical fibers from an inverse dispersion double spectroscope.;SOLUTION: The 1st order diffracted light λ12 of the rays of light which has passed a grating 12 with light λ2 from a beam steering mechanism 15 is made incident on one of optical fibers 1 to 8 for output through a magnifying optical system 11. On the other hand, 0 order diffracted light λ02 different from the 1st order diffracted light λ12 of the rays of light which has passed the grating 12 is made incident on an output place monitoring device 200. The output place monitoring device 200 is equipped with a photo sensor 24 for output place detection which is arranged in a position which is shifted from a conjugate position with the reflecting surface of the micro-mirror of the beam steering mechanism 15. The device 200 recognizes the output place of the 1st order diffracted light λ12 by which position of the the sensor 24 the 0 order diffracted light λ02 is received.;COPYRIGHT: (C)2005,JPO&NCIPI
机译:解决的问题:在不损害从逆色散双光谱仪入射到输出光纤的光线的情况下,监视光线入射到输出光纤的情况;解决方案:一阶衍射光。使来自光束转向机构15的具有光λ2的光束的<Sub 1 <Sub 2> 2入射到光纤1〜8之一上,并通过放大光输出。另一方面,系统11通过的光的0阶衍射光λ 0 2与1阶衍射光λ 1 2不同。光栅12入射到输出位置监视装置200上。输出位置监视装置200配备有用于检测输出位置的光电传感器24,该光电传感器24布置在从共轭位置与微镜的反射面偏离的位置。 -光束转向镜机构15。装置200通过传感器24的哪个位置识别1次衍射光λ 1 2的输出位置。0次衍射光λ 0 2 。;版权所有:(C)2005,JPO&NCIPI

著录项

  • 公开/公告号JP2004325928A

    专利类型

  • 公开/公告日2004-11-18

    原文格式PDF

  • 申请/专利权人 NIKON CORP;

    申请/专利号JP20030122229

  • 发明设计人 TAKAHASHI KOZO;

    申请日2003-04-25

  • 分类号G02B6/293;G01J3/18;G02B5/18;G02B26/08;

  • 国家 JP

  • 入库时间 2022-08-21 22:34:23

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