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TUNING FORK TYPE QUARTZ OSCILLATOR FOR ANGULAR VELOCITY SENSOR, AND MANUFACTURING METHOD THEREFOR
TUNING FORK TYPE QUARTZ OSCILLATOR FOR ANGULAR VELOCITY SENSOR, AND MANUFACTURING METHOD THEREFOR
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机译：角速度传感器的音叉型石英振荡器的调谐器及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide an angular velocity sensor element of high precision facilitating production, and a manufacturing method therefor.;SOLUTION: In this turning fork type quartz oscillator for an angular velocity sensor provided with the first and second sensor electrodes for detecting an angular velocity separated electrically each other on at least one face out of side faces of a tuning fork arm, using a longitudinal direction of a tuning fork-like quartz piece as a Y-axis of crystal axes X, Y, Z, a width direction as an X-axis thereof and a thickness direction as a Z-axis thereof, the tuning fork-like quartz piece is formed of a single plate quartz wafer by a photo-etching technique, the side face of the tuning fork arm formed with the first and second sensor electrodes serves as a +X-face, and the first and second sensor electrodes are arranged in both sides of a protruded ridge line part generated along a longitudinal direction of the side face resulting from the +X-face.;COPYRIGHT: (C)2005,JPO&NCIPI
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