PROBLEM TO BE SOLVED: To provide a clamping mechanism or the like having no possibility of contacting with the lower surface of a pod upon mounting the pod on a mounting table in a load port.;SOLUTION: The unit for clamping the pod is provided with and constituted of a horizontal cylinder fixed to the rear surface of the mounting table to expand or contract the horizontal cylinder rod into a first direction, a vertical cylinder fixed to the horizontal cylinder rod to expand or contract a vertical cylinder rod into a second direction, and a clamping member fixed to the vertical cylinder rod. In this case, the mounting table is provided with an opening, through which the vertical cylinder rod can be penetrated and which permits the existence of the clamping member on the surface side of the mounting table.;COPYRIGHT: (C)2005,JPO&NCIPI
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