首页> 外国专利> Flow regulator for fluids flowing in channels within microtechnology components, has an adjustable flow resistance that is controlled by a regulation unit based on the output of a flow sensor

Flow regulator for fluids flowing in channels within microtechnology components, has an adjustable flow resistance that is controlled by a regulation unit based on the output of a flow sensor

机译：用于在微技术组件内的通道中流动的流体的流量调节器，具有可调节的流阻，该流阻由调节单元根据流量传感器的输出进行控制

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摘要

A flow regulation unit for adjusting the volume or mass flow of gaseous or liquid media in channels (6) of microtechnology components, has an adjustable flow resistance and flow sensor connected in series with a regulation unit whose input is connected to the flow sensor and whose output is connected to the flow resistance.

机译：一种用于调节微技术部件通道（6）中气态或液态介质的体积或质量流量的流量调节单元，具有与调节单元串联的可调节流阻和流量传感器，该调节单元的输入连接到流量传感器，并且输出连接到流阻。

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公开/公告号DE10314386A1

专利类型
公开/公告日2004-10-07

原文格式PDF
申请/专利权人 ABB RESEARCH LTD. ZUERICH;
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申请/专利号DE2003114386
发明设计人 SCHMIDT CHRISTIAN-JOACHIM;WETZKO MANFRED;VOGEL ALBRECHT;KRIPPNER PETER;BINZ DIETER;RUZZU ANTONIO;MERTE ROLF;MUELLER JOERG;KRUSEMARK OLAF;
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申请日2003-03-28
分类号G05D7/06;G01F1/56;B81B7/00;
国家 DE
入库时间 2022-08-21 22:43:20

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