首页> 外国专利> Coating installation for medium and small diameter optical components with curved surfaces, e.g. lenses, mirrors, etc. for photobjective lenses of consumer optics

Coating installation for medium and small diameter optical components with curved surfaces, e.g. lenses, mirrors, etc. for photobjective lenses of consumer optics

机译:带有弯曲表面的中,小直径光学组件的镀膜装置,例如消费类光学反射镜的镜片,镜子等

摘要

The coating installation comprises planetary system (1) for rotary motion of substrates (20) during coating. Planetary system contains main carrier (2), rotatable about main rotation axis (3), and number of substrate carriers (4) rotatable about substrate carrier axes (5), relative to main carrier. Substrate carriers are fitted in different radial spacing to main rotation axis, preferably on several concentric rings round main rotation axis, typically on two or three rings. There may be ten to thirty substrate carriers. INDEPENDENT CLAIM is included for planetary system.
机译:涂覆设备包括用于在涂覆期间使基底(20)旋转运动的行星系统(1)。行星系统包括可绕着主旋转轴线(3)旋转的主支架(2),以及可相对于主支架绕着衬底支架轴线(5)旋转的多个衬底支架(4)。基板支架以不同的径向间距安装在主轴上,最好安装在围绕主轴旋转的多个同心环上,通常安装在两个或三个环上。可能有十到三十个基板载体。独立声明包含在行星系统中。

著录项

  • 公开/公告号DE10308471A1

    专利类型

  • 公开/公告日2004-09-16

    原文格式PDF

  • 申请/专利权人 HENSOLDT AG;

    申请/专利号DE2003108471

  • 发明设计人 HELLER MATTHIAS;

    申请日2003-02-20

  • 分类号C23C14/22;G02B1/10;

  • 国家 DE

  • 入库时间 2022-08-21 22:43:25

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