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Capacitive pressure sensor has its dimensions optimized using an iterative numerical method so that errors caused by tensioning forces and temperature hysteresis are minimized
Capacitive pressure sensor has its dimensions optimized using an iterative numerical method so that errors caused by tensioning forces and temperature hysteresis are minimized
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机译：电容式压力传感器的尺寸采用迭代数值方法进行了优化，从而将由张紧力和温度滞后引起的误差降至最低
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摘要
Capacitive pressure sensor has a pressure measurement cell with a cylindrical base body with a first diameter and a first thickness, a measurement membrane of the front surface of the base body with a second diameter and thickness, an elastic sealing ring with third diameter and thickness and a support ring with fourth diameter and thickness. The pressure measurement cell is clamped between the sealing ring and the support ring using a clamping ring. The dimensions of the components are such that axial tensioning and radial deformation of the measurement cell are minimized. An Independent claim is made for a method for iterative optimization of the dimensions of a support ring and a decoupling element for the pressure sensor based on use of finite element techniques.
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