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AUTOMATIC DEFECT MEASUREMENT SYSTEM WITH A BEAM SOURCE, A LENS, A BEAM DISTRIBUTOR/COUPLER, A PHASE SHIFT UNIT, A CCD CAMERA, A SHEARING FORCE CONTROL UNIT, A MIRROR, AND A SENSOR HOUSING BY USING SHEARING RANGE CONTROL DEVICE
AUTOMATIC DEFECT MEASUREMENT SYSTEM WITH A BEAM SOURCE, A LENS, A BEAM DISTRIBUTOR/COUPLER, A PHASE SHIFT UNIT, A CCD CAMERA, A SHEARING FORCE CONTROL UNIT, A MIRROR, AND A SENSOR HOUSING BY USING SHEARING RANGE CONTROL DEVICE
PURPOSE: An automatic defect measurement system by using a shearing range control device is provided to precisely detect a degree of a defect by automatically image-processing shearing force. CONSTITUTION: An automatic defect measurement system includes a beam source(1), a lens(3), a beam distributor/coupler(4), a phase shift unit(5), a CCD camera(6), a shearing force control unit(7), a mirror(8), and a sensor housing(9). When a laser beam generated from the beam source(1) is irradiated onto an object(2), a scattered reflection is generated from the object(2). The scattered beam is incident into the sensor housing(9) through the lens(3). The scattered beam is branched at the beam distributor(4) provided at a rear end of the lens(3). Branched beams are introduced into the mirror(8) and the CCD camera(6).
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