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METHOD AND APPARATUS FOR PREPARING FLUORINE-CONTAINING POLYIMIDE FILM HAVING EXCELLENT CHEMICAL, DIELECTRIC, ELECTRIC AND OPTICAL PROPERTIES
METHOD AND APPARATUS FOR PREPARING FLUORINE-CONTAINING POLYIMIDE FILM HAVING EXCELLENT CHEMICAL, DIELECTRIC, ELECTRIC AND OPTICAL PROPERTIES
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机译：具有优异的化学，介电，电和光学性能的含氟聚酰亚胺薄膜的制备方法和装置
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摘要
PURPOSE: Provided is a method for preparing a fluorine-containing polyimide film which has excellent heat resistance, chemical resistance, water repellency, dielectric properties, electric properties and optical properties. CONSTITUTION: The method for preparing a fluorine-containing polyimide film comprises the steps of: coating a film of fluorine-containing polyimide precursor(22) under atmosphere having a relative humidity controlled to the level of 50 RH% or less; and heat-treating the fluorine-containing polyimide precursor to form a fluorine-containing polyimide film. Particularly, the coating step comprises dropping the fluorine-containing polyimide precursor(22) onto a substrate(2), and spin coating the fluorine-containing polyimide precursor(22).
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