首页>
外国专利>
SUBSTRATE INSPECTION APPARATUS INCLUDING OUTER APPEARANCE INSPECTION UNIT AND X-RAY INSPECTION UNIT INTEGRATED INTO SINGLE UNIT, AND SUBSTRATE INSPECTION METHOD
SUBSTRATE INSPECTION APPARATUS INCLUDING OUTER APPEARANCE INSPECTION UNIT AND X-RAY INSPECTION UNIT INTEGRATED INTO SINGLE UNIT, AND SUBSTRATE INSPECTION METHOD
展开▼
机译：基板检查装置，包括将外观检查装置和X射线检查装置一体化为一体的基板检查方法以及基板检查方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A substrate inspection apparatus and a substrate inspection method are provided to reduce a space occupied by the apparatus and shorten inspection time by integrating an outer appearance inspection unit and an X-ray inspection unit. CONSTITUTION: A substrate inspection apparatus comprises an outer appearance inspection unit(2) for inspection outer appearances of print substrates; an X-ray inspection unit(3) for radiating X-ray to print substrates for X-ray inspection; a transfer unit for transferring print substrates from the outer appearance inspection unit to the X-ray inspection unit; and a control unit for controlling a first mode and a second mode. The first mode radiates light from the outer appearance inspection unit to a print substrate serving as a reference, creates optical reference image based on the reflected light, transferring the relevant print substrate to the X-ray inspection unit by the transfer unit, radiates X-ray from the X-ray inspection unit, and creates the transmitted image as X-ray reference image. The second mode radiates light from the outer appearance inspection unit to a print substrate serving as a reference, determines pass or failure of connection portion of an electronic component in the print substrate by comparing the image based on the reflected light and the optical reference image, transfers the determined print substrate to the X-ray inspection unit by the transfer unit, radiates X-ray to the substrate from the X-ray inspection unit, and determines pass or failure of connection portion of the electronic component in the print substrate by comparing the X-ray image and the X-ray reference image.
展开▼
